Saint Petersburg National Research University of Information Technologies, Mechanics and Optics

Robust Control of Rapid Thermal Processes Applied to Vapor Deposition Processing

Authors: Aranovskiy S, Kapitonov A., Bobtsov A., Pyrkin A., Zavarin E., Davydov D., Ortega R.

Year: 2014

Publisher: 6th International Congress on Ultra-Modern Telecommunications and Control Systems

Pages: 672-677

Country: Россия

City: Санкт-Петербург

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